Optical heterodyne grating shearing interferometry for long-range positioning applications

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題名:	Optical heterodyne grating shearing interferometry for long-range positioning applications
作者:	Lee,JY;Lu,MP
貢獻者:	光機電研究所
關鍵詞:	DISPLACEMENT MEASUREMENT;RONCHI TEST;ACCURACY;TECHNOLOGY;INPLANE;SYSTEM
日期:	2011
上傳時間:	2012-03-27 16:27:14 (UTC+8)
出版者:	國立中央大學
摘要:	We develop a displacement measurement and positioning system with nanometer resolution over the millimeter traveling range The method is based on a heterodyne grating shearing interferometry a homemade lock-in amplifier and a servo control loop for displacement sensing and positioning The quasi-common optical path configuration of our system provides better immunity against environmental disturbances The experimental results demonstrate that our system can measure small and long displacement with nanometric resolution The device achieves a positioning resolution of 23 nm over a traveling range of 20 mm (C) 2010 Elsevier BV All rights reserved
關聯:	OPTICS COMMUNICATIONS
顯示於類別:	[光機電工程研究所 ] 期刊論文

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