半導體及其相關產業的蓬勃發展導致揮發性有機物之使用量大幅上升，市面上多數業者選擇吸附濃縮搭配焚化做為防制處理技術，本研究探討以活性碳纖維為濃縮裝置及低溫觸媒氧化做為防制處理技術之效能並於國內某電子業製造公司進行測試。氣流中揮發性有機物成份包括甲苯、異丙醇及正丁醇，經由連續監測排氣之相關數據，探討系統對揮發性有機物(VOCs)的去除效率及運轉成本，並分析與其他吸脫附及焚化系統的成本差異及經濟性。研究結果顯示風量平均為100 ± 5CMM，入口VOCs濃度達1500 ppm時，脫附氣體經熱交換器後可達脫附所需溫度；入口濃度較低時則需要額外能源加熱，主要為加熱器及氧化爐之電力消耗，設備能源消耗以觸媒氧化系統占比最大，設備CO2排放量估算為233.19公噸CO2e/年，相比於蓄熱式焚化系統降低約47.6%。在去除效率方面，系統整體去除效率皆大於90%且符合A廠之排放標準，顯示其對揮發性有機物有良好的去除效果，長期穩定性測試結果顯示，在平均為1000 ppm之中高入口濃度及平均為400 ppm之低入口濃度，活性碳纖維吸附系統皆有良好的吸附效率，不會隨著進口濃度差異而減低，顯示對於低濃度也有良好的去除效率。在經濟效益方面，觸媒氧化爐之運轉成本低於直燃式及蓄熱式氧化爐，主要原因是其較低的運轉溫度，而直燃式氧化爐之維護成本相對較低。;Along with the rapid development of semiconductor and related industries, emission of volatile organic compounds (VOCs) in Taiwan has increased sharply. This research evaluates the effectiveness of applying activated carbon fibers as concentration device and low-temperature catalytic oxidation as treatment technology for VOCs removal in an electronics manufacturing company (Plant A). The VOC components include toluene, isopropanol, and 1-butanol. Continuous Emission Monitoring System (CEMS) data from Plant A were collected to explore the removal efficiency and operating cost for removing volatile organic compounds. Additionally, economic viability compared to other adsorption-desorption and oxidation systems is also analyzed. The results show that as the inlet concentration of VOCs reaches 1000 ppm, the desorbed gas can reach the temperature required for desorption after passing through the heat exchanger. As the inlet concentration is low (about 400 ppm), additional energy is needed for the heater and oxidizer. The energy consumption of the system is mainly attributed to the catalytic oxidation system, with the CO2 emission of 233.19 tons CO2e per year, which is 47.6% lower than that of regenerative thermal oxidizer (RTO) system. In terms of removal efficiency, the overall VOCs removal efficiency achieved is greater than 90% and meets the emission standards of Plant A, indicating effective removal of volatile organic compounds. In terms of economic benefits, the catalytic oxidation has lower operating costs than the thermal or regenerative thermal oxidizer, primarily due to its lower operating temperature and higher heat exchange efficiency.
