| 摘要: | 玻璃因其穩定的物理及化學特性，在生物醫學、航太、微電子以及半導體等不同的領域中得到廣泛的應用。在各個領域都會碰到玻璃接合的問題，如半導體中對電子元件的封裝等。在傳統的玻璃接合中，幾乎所有方法都難以提供高效率以及高經濟效益所需的精度、黏合品質以及生產速度。近年來，隨著激光技術的進步，通過脈衝激光實現玻璃局部焊接變得越來越容易。 此外，利用玻璃對超快脈衝激光的非線性吸收機制，也可實現了兩片玻璃界面的雷射透射焊接。
在脈衝式雷射的加工系統中，其光路安排可分為短焦物鏡系統與長焦振鏡系統。短焦的物鏡系統將雷射光聚焦於較小的尺度範圍內，對材料的處理範圍較小，且光與材料的相對運動僅能依靠平台移動，無法有效地提高焊接效率。而長焦振鏡系統則透過兩壓電片驅動兩反射鏡，再以場鏡聚焦，可有效、快速地以掃描的方式進行圖案化之焊接。本研究在不使用任何夾治具下，使用振鏡系統對玻璃進行焊接，與短焦物鏡系統相比，雖然對原材料的改變範圍較大，但焊接的速度卻可有效地提高。本研究同時也對不同焊接參數組做討論，透過強度測試找出最佳參數組，結果顯示，剪應力強度在能量為9 W且線距為25 μm時可以得到最好的強度，80.52 MPa，而拉應力則是在7 W與線距25 μm得到最佳強度，11.29 MPa。藉由焊接點之橫截面觀察，發現對於剪應力的破壞是由兩片玻璃之間進行破裂，而拉應力則是在熔融區域的下緣與下片玻璃間產生分離。本文也透過高速攝像機觀察接合過程中焊接截面的外形演變，同時整合了文獻上的報導，對玻璃與玻璃的雷射接合過程做更完整的闡述。;Due to its stable physical and chemical properties, glass is widely used in different fields such as biomedicine, aerospace, microelectronics, and semiconductors. The problem of glass bonding is encountered in various fields, particularly for packaging in electronics, optronics, and semiconductors. In the literature, there have been several methods reported for glass-to-glass welding, however, most of them are difficult to simultaneously provide the precision, weld quality, and production speed required for high efficiency and high economic benefits. Recently, with the advancement of laser technology, it has become easier to achieve localized welding of glass with pulsed lasers. In addition, the nonlinear absorption mechanism of an ultrafast pulsed laser by the glass can also be used to realize laser transmission welding at the interface of two pieces of glass.
In the pulsed laser processing system, its optical path arrangement can be divided into a short-focus objective lens system and a long-focus galvanometer system. The former focuses the laser light on a smaller spot, and the relative movement of the light and the material can only rely on the movement of an X-Y table, which cannot effectively improve the welding efficiency. For the latter, the incoming laser light is aligned through two reflectors agitated by two piezo plates and focusing through an f-theta lens. Consequently, patterning welding can be effectively achieved. In this study, the galvanometer system is used to weld the glass and glass without us-ing any fixtures. Compared with the short-focus objective lens system, although the welding range of raw materials is larger, the welding speed can be effectively improved. This study also tests different process parameter sets and finds out the relative best set through strength tests of the welds. Results show that the highest shear stress could achieve was 80.52 MPa when the processing laser power was 9 W and the scanning line space was 25 μm. The highest available tensile stress was 11.29 MPa at the power of 7 W and the scanning line space of 25 μm. Through the observation of the cross-section of the weld spot, it was found that the damage to the shear stress was caused by the crack between the two glass pieces, while the separation by tensile stress occurred between the lower edge of the molten and the lower glass. This study al-so usds a high-speed camera to observe the evolution of the weld during the bonding and, com-bined with reports in the literature, provided a complete description of the glass-to-glass laser bonding process. |
