從WFS到MTF-以小型鏡頭為例;From WFS to MTF, take the miniature lens as exemplary

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题名:	從WFS到MTF-以小型鏡頭為例;From WFS to MTF, take the miniature lens as exemplary
作者:	彭柏豪;Peng, Bo-Hao
贡献者:	光電科學與工程學系
关键词:	波前檢測;焦點位移量測;焦平面量測;調製傳遞函數;wavefront sensing;focus displacement sensing;focal plane measurement;Modulation Transfer Function
日期:	2021-08-11
上传时间:	2021-12-07 11:49:46 (UTC+8)
出版者:	國立中央大學
摘要:	在光學製造業中，影響整個鏡組成像品質的原因不單只是鏡面加工的誤差與組裝上的偏心、傾斜所導致，鏡頭的焦平面與傳感器或底片之間的對齊誤差也會造成失焦導致成像品質降低，而調製轉換函數(MTF)是最廣泛被用來評估成像品質的一種分析方式。本論文提出以旋轉平台來旋轉待測鏡頭，並以 Shack-Hartmann Wavefront Sensor 量測其於不同場及不同方位角的波前形貌，而我們能透過該波前形貌去計算出該光束的聚焦位置，再通過一些實驗步驟來計算出轉軸中心及向量，最後透過座標旋轉後得到該鏡頭的焦平面數據，而我們也能透過對量測到的波前形貌、光束的半徑及回推波前得到的聚焦位置進行傅氏轉換及座標轉換得到該位置的調製轉換函數。其中 MTF 的量測精度取決於 Wavefront Sensor 的波前量測精度與計算中近似造成誤差，由於是以傅氏轉換的方式去計算，所以其頻率解析度可以到無限小，但相對地計算量也會增加；至於焦平面的量測精度則是取決於Wavefront Sensor 的量測精度，以本實驗為例，其量測精度為3um。;In the Optical manufacturing industry, the reason that affects the image quality of Lens is not only caused by the surface processing error and decenter and tilt of assembly, but also the alignment error between the focal plane of lens and sensor or film. This misalignment will cause the image to become blurred. And The Modulation Transfer Function(MTF) is the most widely used analysis method to evaluate the image quality. This thesis proposes to use the rotating stage to rotate the lens to be tested, and use the Shack-Hartmann Wavefront Sensor to measure its wavefront profile in different field and at different azimuths, and we can use the wavefront profile to calculate the focusing position of beam, and then use some experiment to calculate the center and vector of the axis of rotation, and finally get the focal plane profile of the Lens after the coordinate conversion, and we can also obtain the modulation transfer function by using Fourier transform and coordinate conversion on the measured wavefront, beam radius and focus position measured by wavefront sensor.
显示于类别:	[Graduate Institute of Optics and Photonics] Electronic Thesis & Dissertation

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