本論文目的為改善傳統脈衝式蘭摩爾探針之汙染層問題，藉由數據模擬，研究探針上汙染層對電流量測的影響，開發演算法修正電流量測精準度並強化抗雜訊能力。為提高空間解析度，將以最少的脈衝數量量測I-V曲線，找出具代表性的掃描電壓點，推算電子溫度、濃度。最後，研究脈衝下降緣汙染層電容跨壓衰減的特徵，藉由演算法計算電容放電需時，以獲得最佳化脈衝間隔時間。;The purpose of this paper is to improve the traditional pulsed langmuir probe. By data simulation, we studied the influence of the contamination layer on the probe, and develop an algorithm to correct the current measurement accuracy and enhance the anti-noise capability. In order to improve the spatial resolution, this paper attempts to measure the I-V curve with the minimum number of pulses, we find the representative scanning voltage point to calculate the electron temperature and density. Finally, we studied the characteristics of the contamination discharge curve, and develop an algorithm to calculate the capacitance discharge time and optimize the pulse interval time.
