中央大學光學檢測實驗室所提出的Shack-Hartmann Wavefront Sensor由微透鏡陣列與相機組合而成，因此在使用之前，必須校正光學元件，將系統的誤差降至預定範圍內，量測時才可掌握各元件誤差對資料的影響。 精密平台校正實驗的目的為量測校正微透鏡陣列所需的數據。將點光源架設在精密平台上，改變點光源在空間中的位置，為每個微透鏡建立點擴散函數與入射角的資料庫，以對微透鏡進行校正。由於需記錄點光源的位置，因此本篇論文提出以干涉儀架設正交三維座標系統的流程，並分析架設過程所產生的誤差對點光源位置的影響。 由於精密平台校正實驗需要前後移動點光源，如果光源強度和相機快門都維持定值，可用來校正的資料將會難以取得。故使用高動態範圍取像技術，將同一位置上，不同快門值的照片疊合，以取得一張可校正的資料，並且將相機快門的設定自動化以提升資料量測的效率。;A new setup of Shack-Hartmann Wavefront Sensor consisting of a microlens array and a camera is proposed by Optical Element Testing Lab of National Central University. Before using, Shack-Hartmann Wavefront Sensor has to be calibrated to improve the accuracy and precision of the system and control the errors caused by the misalignment. The experiment to calibrate precision platform with interferometer is to measure data for the calibration of microlens array. In the experiment, a point light source is on a precision platform and moved along Z axis. The incident angle of light to each lenslet will change when the light source is moving, so the relation of incident angle and point spread function of a lenslet can be measured. This relation can calibrate the errors caused by microlens array. In this thesis, a setup of three dimensional orthogonal coordinate to record the position of light source with interferometer is proposed, and the errors in the orthogonal coordinate are analyzed. Because light source is moved along Z axis, if the power of light source and shutter time is fixed, it is hard to get available data. In this thesis, a method based on high dynamic range imaging is proposed to solve the problem, and automatize the determination of shutter to improve the efficiency of the measurement.
