摘要 本研究係使用二維電子感測器進行半導體晶圓平坦度之量測，利用其高精密及高靈敏之測距能力，本研究的原理是使用波形產生器產生等電位波形，在晶圓表面形成的等電位場，當晶圓表面高度有差異(也就是說不平坦時)，等電位場會產生偏移的狀況，由四端子感測棒，所感測的不同電壓差值，即可得知電位差及高度差，進而算出晶圓之平坦度。 本研究所介紹之二維電子感測器其利用四點探針，其主要元件包括，緩衝器、加減法器、反像放大器、高通濾波器、低通濾波器等，用以偵測X方向及Y方向之電位差，由此推測晶圓表面之X方向及Y方向之高度差，進而算出晶圓之平坦度。 除此之外，亦可用於玻璃面板之平坦度量測。 Two dimensional electric field sensors Abstract This research is introduced by two dimension electrical sensors for measuring flatness of semiconductor wafer, using high sensitive and more precision capability of this equipment for measurement. The principle of this research makes use of same level of electrical field within wafer, when wafer surface are different height and it means have variation within wafer. The sensor can detect them by different delta voltage and transfer to height. In other word, it means from voltage domain to distance domain. Then we can use height of every point to calculate flatness (GBIR) of wafer. This research is introduced by two dimension electrical sensors for measuring flatness of semiconductor wafer, its major device is included by a buffer, add and subtraction unit, amplifier, high p filter and low p filter, this device is used to detect delta voltage in X and Y direction, then also transfer to delta height in X and Y direction, then we can get flatness of wafer. Except this, we also can use this equipment to measure flatness of TFT-LCD glass plate.
