本研究以主動式相位移動法，針對印刷電路板上的各式元件進行相對高度的量測。目的建立一套簡易架構、快速量測、低成本的主動式非接觸光學量測系統，以高度重建三維形貌與量測體積，提升工業界檢測品質。傳統相位移動法採用精密光柵的移動產生不同相位條紋，並藉此產生高精度條紋來提高檢測精度與解析度，但傳統移動光柵容易發生條紋相位的精確度失準，使計算產生誤差。本研究採用數位投影機進行相位條紋的投影，並結合CMOS影像擷取模組與個人電腦，經由條紋影像於物件上產生的相位資訊，進行快速的面量測設備。由於採用數位投射裝置，文中探討設備造成之非線性灰階修正，並提出灰階條紋的修正方式，提升輪廓與體積計算的精確度。最後將修正結果套入實際量測驗證，並採用精密移動平台驗證系統，其高度檢測精度可達到0.01mm。;This study focuses on the height profile measurement for printed circuit board (PCB). The measurement technology is based on the four phase-shifting method. We propose the easier, faster and low cost measurement system to improve the industrial inspection. In traditional phase-shifting method used grating to generate the fringes. By grating moving to get the difference phase fringes and calculate the height. But grating moving is not easy, if have some error, the result will not accurate. In this paper, we use digital projector to generate the phase fringes, with CMOS module and personal computer, we can easier and faster to measure the area data and reconstruct a 3D model. By digital projector the gray level may not linear, here propose the method to calibrate the result and actually work on the measurement system. Finally used the precision mobile platforms to confirm the height measurement accuracy is 0.01mm and prove the system has high repeatability.
