近年來微機電系統發展迅速，石英晶體愈做愈小，因其具有壓電效應、化學穩定性良好等優異性質，因此廣泛被應用於微機電系統之關鍵零組件。但由於其硬脆特性，若以傳統之加工方式很難在效率與精度二者之間同時兼顧。電化學放電加工是以高溫熔融並利用此高溫加速蝕刻速率的非傳統加工方法，相當適合作為加工石英之製程技術。唯此製程技術中，仍然存在著許多有待釐清且改善的問題，其中氣泡於電極表面生成時的狀態不僅影響氣膜結構的緻密性，同時為影響放電火花效率的重要因素之一；另外，氣膜受到氣泡不斷結合、脫離的影響下，使得氣膜處在此動態的環境中，穩定程度受到嚴重的考驗。有鑑於此，透過本論文的研究，逐步釐清、解析、並提供如何增加氣膜穩定性、加工效率的方法，以提升電化學放電加工之性能。 首先，在設備部分，與以往不同的是將工件裝置於主軸上，並將電解液由軸中心送入，而不是使用電解槽將工件浸泡於電解液中，這樣一來電解液會不斷更新，也會沖走因切削而產生的切屑，有助於加工；電解液濃度也會保持一定，不會隨著時間增加產生濃度變化而影響加工。另外，由於不同電解液種類、輸入電壓、電解液流量、電解液濃度及工件進給速率等，都會影響加工效率與精度，所以必須對不同參數各別調整，找出能夠達到最佳效率與精度的加工參數。 經過實驗後發現切割長度隨入電壓及電解液濃度上升而增加；隨著電解液流量及進給速度增加而減少，輔助石墨電極使切槽入口及出口處不易產生擴槽，因此平均切割寬度無明顯變化。 使用電解液滴定法進行電化學放電加工，電解液的使用量少、擴槽量小、準直性佳，切割面不會產生脆裂現象。在電解液效果部份發現，與使用加工槽浸入式加工相同，使用KOH電解液效果較使用NaOH電解液效果好。 In recent years the rapid development of micro-electro-mechanical systems the smaller quartz crystal to do more because of their piezoelectric effect good chemical stability excellent properties, it is widely used in micro-electromechanical systems key components. However, due to its hard and brittle characteristics terms of traditional processing methods is difficult in the efficiency and precision between both. Electrochemical discharge machining high-temperature melting and high temperature accelerated the etching rate of the non-traditional processing methods process technology quite suitable as processing of quartz. Only this process technology, there are still many pending clarification and improvement of the problem not only affects the denseness of the gas film structure wherein a state when the bubble is generated at the electrode surface at the same time as one of the important factors affecting discharge spark efficiency addition, the gas film by bubbles constantly detachment under the influence of the gas film in this dynamic environment stability is put to severe test. In view of this through this thesis and gradually clarified resolution and how to increase the stability of the gas film the processing efficiency of the method to enhance the performance of the electrochemical discharge machining. First, part of the device with the conventional type of apparatus the workpiece spindle and the electrolyte is fed from the axial center of the electrolytic cell instead of using the workpiece is immersed in the electrolyte so that the electrolyte is continually updated also washed away by the chips generated by cutting contribute to the processing electrolytic solution concentration will remain constant does not increase over time produced a concentration change and the impact of processing. In addition, due to the different type of electrolyte, input voltage, electrolyte flow rate, electrolyte concentration and workpiece feed rate etc. will affect the processing efficiency and accuracy it is necessary to adjust each of the different parameters to find out to be able to achieve the best efficiency and accuracy the processing parameters. Through experiments and found that cutting length with rising input voltage and electrolyte concentration increases With the electrolyte flow and feed rate decreases with increasing auxiliary graphite electrodes make grooving easy to produce the inlet and outlet expansion slot, so the average cutting width without significant change. Titration using electrolyte electrochemical discharge machining, electrolyte use less、 a small amount of expansion slots、collimation resistance, cutting surface does not produce embrittlement phenomenon. Part in the electrolyte effects found with the use of the same machining tank immersion process using KOH electrolyte was better than using NaOH electrolyte effect.
