應用電化學放電與電泳拋光的複合製程改善硼矽玻璃三維微結構的成形精度研究; Electrophoretic Deposition Grinding (EPDG) for Improving the Precision of 3d Microstructure via Ecdm(I)(II)(III)

NCUIR > Engineering College > Departmant of Mechanical Engineering > Research Project > Item 987654321/46681

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Title:	應用電化學放電與電泳拋光的複合製程改善硼矽玻璃三維微結構的成形精度研究;Electrophoretic Deposition Grinding (EPDG) for Improving the Precision of 3d Microstructure via Ecdm(I)(II)(III)
Authors:	顏炳華;黃豐元
Contributors:	機械工程學系
Keywords:	機械工程類
Date:	2010-08-01
Issue Date:	2011-07-12 13:57:00 (UTC+8)
Publisher:	行政院國家科學委員會
Abstract:	Pyrex 玻璃由於強度極高，在機械加工、微細加工上有很多問題，使得這些材料僅能用於精度要求不高的場合，而電化學放電加工已被證實能加工非導電性材料，因此本研究以微放電加工法與電化學放電加工法進行非導電性硬脆材料的微細創成加工研究，使用經微放電加工所製作出來具簡單形狀(圓形、方形)的微細電極，對前述的各種非導電的硬脆材料進行創成加工，然而，根據文獻，目前對電化學放電加工的技術發展仍有一些瓶頸，因此本研究主要進行: (1). 電化學放電加工電極損耗機制的探討及無消耗電極的電化學放電加工技術的研究。 (2). 利用電泳吸附沉積研磨來改善Pyrex 玻璃電化學放電加工表面品質。 (3). 建立一種結合電化學放電加工與電泳沉積研磨，可應用於Pyrex 玻璃上製作高精度微孔的複合加工技術。本研究成果之創成電化學放電加工技術可以加工非導電性材料（陶瓷、玻璃、鑽石…等），突破傳統放電加工受限於導電材料的限制；配合電泳沉積吸附，可以在各種硬脆材料上以創成的加工方式，加工出高精度的微孔洞及複雜的3D 微細結構，為硬脆材料的實用化，提供了一低成本而有效的加工方式，並可應用於寶石、陶瓷與玻璃等加工業。 The machining of Pyrex glass gets some problem in micro machining because their high strength and hardness. Therefore, they can’t be used to a precision and optical field though they have very good mechanical and chemical properties. In this project, a combined machining method is proposed here for the fabrication of high precision and low surface roughness microchannel and complex 3D microstructure. Wire electro-discharge grinding (WEDG) and electrochemical diacharge machining electro-discharge machining (ECDM) are integrated on the micro-EDM worktable to provide a capability of making ca-axial micro tools for Pyrex glass micro drilling. The combination of WEDG, EDM and ECDM on a hybrid machine also makes possible the construction of complex 3D microstructure within one total manufacture process. According to the literature, there are still have several inherent problems, sure as taper hole and surface roughness not enough to optical filed In this project, three issues below will be studied. (1) Studying the wear mechanism of electrode tool in ECDM process; developing lossless electrode technology. (2) Electrophoretic deposition grinding for improving the surface roughness of microholes drilled via ECDM (3) Building the combination experimental apparatus (micro ECDM and EPDG) for high precision microstructure shaped. After this, a combinative machining technology of high precision micro-holes and complex 3D microstructure can be established and offers a reference to the academia and industry. 研究期間：9908 ~ 10007
Relation:	財團法人國家實驗研究院科技政策研究與資訊中心
Appears in Collections:	[Departmant of Mechanical Engineering ] Research Project

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