利用奈米球微影術與金輔助化學蝕刻法形成矽鍺奈米柱陣列之研究; Study on formation of SiGe Nanorod arrays by Nanosphere Lithography & Au-assisted chemical etching

NCUIR > Engineering College > Institute of Materials Science and Engineering > Electronic Thesis & Dissertation > Item 987654321/43455

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/43455

Title:	利用奈米球微影術與金輔助化學蝕刻法形成矽鍺奈米柱陣列之研究;Study on formation of SiGe Nanorod arrays by Nanosphere Lithography & Au-assisted chemical etching
Authors:	賴志忠;Chih-chung Lai
Contributors:	材料科學與工程研究所
Keywords:	矽鍺;奈米柱陣列;奈米球微影術;金輔助化學蝕刻法;SiGe;Nanorod arrays;Nanosphere lithography;Au-assisted chemical etching
Date:	2010-08-04
Issue Date:	2010-12-08 13:39:30 (UTC+8)
Publisher:	國立中央大學
Abstract:	利用奈米球微影術與金輔助化學蝕刻法形成矽鍺奈米柱陣列之研究 Study on formation of SiGe Nanorod arrays by Nanosphere Lithography & Au-assisted chemical etching
Appears in Collections:	[Institute of Materials Science and Engineering] Electronic Thesis & Dissertation

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