Residual stress in obliquely deposited MgF2 thin films

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35657

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35657

Title:	Residual stress in obliquely deposited MgF2 thin films
Authors:	Jaing,Cheng-Chung;Liu,Ming-Chung;Lee,Cheng-Chung;Cho,Wen-Hao;Shen,Wei-Ting;Tang,Chien-Jen;Liao,Bo-Huei
Contributors:	薄膜技術研究中心
Keywords:	GLANCING-ANGLE DEPOSITION;OPTICAL-PROPERTIES;SURFACE-DIFFUSION;ION ASSISTANCE;COLUMN ANGLE;MICROSTRUCTURE;TEMPERATURE;EVAPORATION;GROWTH;OXIDE
Date:	2008
Issue Date:	2010-07-07 15:47:15 (UTC+8)
Publisher:	中央大學
Abstract:	MgF2 films with a columnar microstructure are obliquely deposited on glass substrates by resistive heating evaporation. The columnar angles of the films increases with the deposition angle. Anisotropic stress does not develop in the films with tilted colu
Relation:	APPLIED OPTICS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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