Multilayer coatings monitoring using admittance diagram

NCUIR > Research Center > Thin Film Technology Center > journal & Dissertation > Item 987654321/35655

Please use this identifier to cite or link to this item: http://ir.lib.ncu.edu.tw/handle/987654321/35655

Title:	Multilayer coatings monitoring using admittance diagram
Authors:	Lee,Cheng-Chung;Chen,Yu-Jen
Contributors:	薄膜技術研究中心
Keywords:	OPTICAL COATINGS;ELLIPSOMETRY;FILTERS
Date:	2008
Issue Date:	2010-07-07 15:47:11 (UTC+8)
Publisher:	中央大學
Abstract:	A method based on admittance diagram called Admittance Realtime Monitoring, ARM, was proposed to monitor multilayer coatings. This optical monitoring method is highly sensitive and capable to compensate for thickness errors. The sensitivities of ARM were
Relation:	OPTICS EXPRESS
Appears in Collections:	[Thin Film Technology Center] journal & Dissertation

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